Japan, Feb. 24 -- ASML NETHERLANDS BV has got intellectual property rights for 'REPLACEABLE MODULE FOR CHARGED PARTICLE APPARATUS.' Other related details are as follows:
Application Number: JP,2024-013933
Category (FI): H01J37/20,H01J37/16,H01J37/18
Stage: PROBLEM TO BE SOLVED: To provide a module replaceable in a charged particle apparatus.SOLUTION: Disclosed herein is a module for supporting a device configured to manipulate charged particle paths in a charged particle apparatus, the module comprising: a support arrangement configured to support the device, wherein the device is configured to manipulate a charged particle path within the charged particle apparatus; and a support positioning system configured to move the support arrangement within the module; wherein the module is arranged to be field replaceable in the charged particle apparatus.SELECTED DRAWING: Figure 7 (Grant)
Filing Date: Feb. 1, 2024
Publication Date: June 25, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
