Japan, March 23 -- TOKYO OHKA KOGYO CO LTD has got intellectual property rights for 'RESIST COMPOSITION AND RESIST PATTERN FORMING METHOD.' Other related details are as follows:
Application Number: JP,2021-099259
Category (FI): G03F7/004,503@A,G03F7/039,601,G03F7/20,501,G03F7/20,521
Stage: Grant (IP right document published.)
Filing Date: June 15, 2021
Publication Date: Dec. 27, 2022
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
