Japan, Jan. 21 -- LAM RESEARCH CORPORATION has got intellectual property rights for 'RF CURRENT MEASUREMENT IN SEMICONDUCTOR PROCESSING TOOL.' Other related details are as follows:
Application Number: JP,2024-106561
Category (FI): H10P50/20,101@B,H05H1/46@R,H01L21/302,101@B,H01L21/31@C,H10P14/60,101@C
Stage: Grant (IP right document published.)
Filing Date: July 2, 2024
Publication Date: Oct. 8, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
