Japan, March 3 -- LAM RESEARCH CORPORATION has got intellectual property rights for 'RING STRUCTURE USED IN PLASMA CHAMBER AND SYSTEM.' Other related details are as follows:
Application Number: JP,2024-177767
Category (FI): H01L21/302,101@G,H10P50/20,101@G
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Oct. 10, 2024
Publication Date: Jan. 14, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
