Japan, Jan. 21 -- LAM RESEARCH CORPORATION has got intellectual property rights for 'RING STRUCTURES AND SYSTEMS FOR USE WITHIN PLASMA CHAMBERS.' Other related details are as follows:
Application Number: JP,2024-023320
Category (FI): H01L21/302,101@G,H10P50/20,101@G
Stage: Grant (IP right document published.)
Filing Date: Feb. 20, 2024
Publication Date: April 23, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
