Japan, Feb. 27 -- DOCUMETARY CHANNEL CO LTD has got intellectual property rights for 'SAMPLE COOLING DEVICE FOR SCANNING ELECTRON MICROSCOPE.' Other related details are as follows:
Application Number: JP,2023-103080
Category (FI): H01J37/28@B,H01J37/20@D,H01J37/20@E
Stage: PROBLEM TO BE SOLVED: To provide a sample cooling device for a scanning electron microscope, capable of preventing a fine oscillation of a sample as well as suppressing a temperature increase of the sample.SOLUTION: A sample cooling device 1 comprises: a chamber 3 defining a sealed space 2 in an internal part; a vacuum pump 4 that makes the sealed space 2 in this chamber 3 into a vacuum state; a sample stage 7 that can be arranged at an irradiation place of an electronic beam 6 of a lens tube 5 of the scanning electron microscope; a cylindrical cooling block 8 onto which this sample stage 7 is mounted; a cylindrical holding part 10 that is arranged around this cooling block 8, and holds the cooling block 8 with a plurality of fixed screws 9; a driving device 11 that moves this cylindrical holding part 10 in X-axis, Y-axis, and Z-axis directions with respect to the electron beam 6 radiated from the lens tube 5; a heat transmission plate 12 that is fixed at a lower end side of the cooling block 8; and a refrigeration head 13 that is provided so as to be opposite to the heat transmission plate 12, and comprises a refrigeration machine 14 for cooling this refrigeration head 13.SELECTED DRAWING: Figure 1 (Grant)
Filing Date: June 23, 2023
Publication Date: Jan. 9, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
