Japan, Oct. 15 -- MITSUBISHI ELECTRIC CORP has got intellectual property rights for 'SEMICONDUCTOR MANUFACTURING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD.' Other related details are as follows:
Application Number: JP,2023-166136
Category (FI): H10W72/30@F,H01L21/68@B,H01L21/52@F,H01L21/68@E,H10P72/00@E,H10P72/30@B
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Sept. 27, 2023
Publication Date: April 8, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
