Japan, June 10 -- ASM IP HOLDING BV has got intellectual property rights for 'SHOWER PLATE, SUBSTRATE PROCESSOR AND SUBSTRATE PROCESSING METHOD.' Other related details are as follows:
Application Number: JP,2021-091168
Category (FI): H10P50/20,101@B,C23C16/455,H01L21/31@C,H01L21/302,101@B,H10P14/60,101@C
Stage: Grant (IP right document published.)
Filing Date: May 31, 2021
Publication Date: Dec. 13, 2021
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
