Japan, Jan. 21 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SOURCE GAS SUPPLY SYSTEM, POWDERY RAW MATERIAL REPLENISHMENT MECHANISM, AND POWDERY RAW MATERIAL REPLENISHMENT METHOD.' Other related details are as follows:
Application Number: JP,2021-092169
Category (FI): B01J4/00,105@D,C23C16/448,B01J7/00@Z
Stage: Grant (IP right document published.)
Filing Date: June 1, 2021
Publication Date: Dec. 13, 2022
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
