Japan, March 3 -- MIMASU SEMICONDUCTOR INDUSTRY CO LTD has got intellectual property rights for 'SPIN ETCHING DEVICE WITH ENDPOINT DETECTION MECHANISM AND SPIN ETCHING METHOD.' Other related details are as follows:
Application Number: JP,2022-186605
Category (FI): C23F1/08,101,H01L21/306@F,H10P50/66
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Nov. 22, 2022
Publication Date: June 3, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
