Japan Intellectual Property Rights: SPUTTERING APPARATUS AND MANUFACTURING METHOD OF ELECTRONIC DEVICE

Japan, Jan. 20 -- CANON TOKKI CORP has got intellectual property rights for 'SPUTTERING APPARATUS AND MANUFACTURING METHOD OF ELECTRONIC DEVICE.' Other related details are as follows:

Application Number: JP,2021-108592

Category (FI): H10K71/16,H10K71/10,H10K71/00,H10K59/10,H10K59/00,H10K50/10,H05B33/10,C23C14/34@C,H05B33/14@A,H10K59/65,C23C14/34@B,C23C14/34@M

Stage: Grant (IP right document published.)

Filing Date: June 30, 2021

Publication Date: Jan. 18, 2023

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication.