Japan, July 20 -- ULVAC JAPAN LTD has got intellectual property rights for 'SPUTTERING TARGET MECHANISM, FILM DEPOSITION APPARATUS AND FILM DEPOSITION METHOD.' Other related details are as follows:
Application Number: JP,2022-051610
Category (FI): C23C14/34@B,C23C14/35@B
Stage: Grant (IP right granted following substantive examination.)
Filing Date: March 28, 2022
Publication Date: Oct. 11, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
