Japan, Aug. 26 -- JUSTEM CO LTD has got intellectual property rights for 'STAGE APPARATUS OF SIDE TRACK BUFFER AND SEMICONDUCTOR PROCESSING APPARATUS HAVING THE SAME.' Other related details are as follows:
Application Number: JP,2025-008718
Category (FI): H01L21/68@V,H10P72/10@T
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Jan. 21, 2025
Publication Date: March 17
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
