Japan, Feb. 24 -- TOKYO ELECTRON LTD has got intellectual property rights for 'STRIPPING METHOD, STRIPPING DEVICE AND STRIPPING SYSTEM.' Other related details are as follows:
Application Number: JP,2021-133172
Category (FI): H01L21/02@B,H01L21/68@N,H10P10/00@A,H10P72/70
Stage: PROBLEM TO BE SOLVED: To provide a technique that can improve the efficiency of peeling treatment.SOLUTION: A peeling method according to an aspect of the present disclosure includes the steps of holding and peeling. The holding step holds a polymerized substrate in which a first substrate and a second substrate are joined. In the peeling step, the first substrate is peeled from the polymerized substrate starting from the side surface of the polymerized substrate. Moreover, the peeling step includes the step of contacting the side surface with a fluid containing water.SELECTED DRAWING: Figure 7 (Grant)
Filing Date: Aug. 18, 2021
Publication Date: March 3, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
