Japan, March 24 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE LOADING TABLE, SUBSTRATE PROCESSING APPARATUS, AND METHOD FOR HEATING SUSCEPTOR.' Other related details are as follows:
Application Number: JP,2022-019023
Category (FI): C23C16/44@B,H01L21/205,H01L21/68@N,H10P14/24,H10P72/70
Stage: Grant (IP right document published.)
Filing Date: Feb. 9, 2022
Publication Date: Aug. 22, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
