Japan, Oct. 21 -- EBARA CORP has got intellectual property rights for 'SUBSTRATE MANUFACTURING METHOD AND SUBSTRATE MANUFACTURING DEVICE.' Other related details are as follows:
Application Number: JP,2022-112208
Category (FI): H01L21/02@B,H10W70/00@Z,H01L23/12@Z
Stage: Grant (IP right granted following substantive examination.)
Filing Date: July 13, 2022
Publication Date: Jan. 25, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
