Japan Intellectual Property Rights: SUBSTRATE MOUNTING TABLE, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSING METHOD

Japan, Aug. 26 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE MOUNTING TABLE, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSING METHOD.' Other related details are as follows:

Application Number: JP,2023-014680

Category (FI): H01L21/302,101@R,H01L21/68@N,H01L21/302,101@G,H01L21/31@C,H10P14/60,101@C,H10P50/20,101@G,H10P50/20,101@R,H10P72/70

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Feb. 2, 2023

Publication Date: Aug. 15, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication.