Japan, Feb. 18 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE MOUNTING TABLE, SUBSTRATE PROCESSING DEVICE, AND SUBSTRATE PROCESSING METHOD.' Other related details are as follows:
Application Number: JP,2022-043801
Category (FI): H01L21/302,101@G,H01L21/68@N,H10P50/20,101@G,H10P72/70
Stage: Grant (IP right granted following substantive examination.)
Filing Date: March 18, 2022
Publication Date: Sept. 29, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
