Japan, March 3 -- KOKUSAI ELECTRIC CORP has got intellectual property rights for 'SUBSTRATE PROCESSING APPARATUS, ELECTRODE, SEMICONDUCTOR DEVICE MANUFACTURING METHOD, AND PROGRAM.' Other related details are as follows:
Application Number: JP,2024-205610
Category (FI): H10P14/692@X,H01L21/31@C,H01L21/316@X,H10P14/694@B,H05H1/46@M,H10P14/60,101@C,C23C16/507,H01L21/318@B
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Nov. 26, 2024
Publication Date: Feb. 14, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
