Japan, Jan. 16 -- CANON INC has got intellectual property rights for 'SUBSTRATE PROCESSING APPARATUS, METHOD FOR CONTROLLING SUBSTRATE PROCESSING APPARATUS, ARTICLE MANUFACTURING METHOD, AND PROGRAM.' Other related details are as follows:
Application Number: JP,2024-193956
Category (FI): B25J13/08@Z,H01L21/68@A,H10P72/30@A
Stage: Grant (IP right document published.)
Filing Date: Nov. 5, 2024
Publication Date: Jan. 24, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
