Japan, July 20 -- KOKUSAI ELECTRIC CORP has got intellectual property rights for 'SUBSTRATE PROCESSING APPARATUS, SEMICONDUCTOR DEVICE MANUFACTURING METHOD, AND PROGRAM.' Other related details are as follows:
Application Number: JP,2023-004743
Category (FI): H01L21/316@A,H10P14/692@A,H10P14/60,101@E,H01L21/31@E
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Jan. 16, 2023
Publication Date: July 26, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
