Japan Intellectual Property Rights: SUBSTRATE PROCESSING APPARATUS, TRANSFER METHOD OF SUBSTRATE SUPPORT, PROGRAM, AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE

Japan, July 20 -- KOKUSAI ELECTRIC CORP has got intellectual property rights for 'SUBSTRATE PROCESSING APPARATUS, TRANSFER METHOD OF SUBSTRATE SUPPORT, PROGRAM, AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE.' Other related details are as follows:

Application Number: JP,2023-009603

Category (FI): H01L21/31@E,H10P72/30@A,H01L21/68@A,H10P14/60,101@E

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Jan. 25, 2023

Publication Date: Aug. 6, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication.