Japan, March 25 -- ASM IP HOLDING BV has got intellectual property rights for 'SUBSTRATE PROCESSING APPARATUS AND CALIBRATION METHOD.' Other related details are as follows:
Application Number: JP,2025-021600
Category (FI): G01J1/00@B,H01L21/31@C,H10P14/60,101@C
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Feb. 13, 2025
Publication Date: April 24, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
