Japan, Sept. 18 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING APPARATUS AND INFORMATION PROCESSING METHOD IN SUBSTRATE PROCESSING APPARATUS.' Other related details are as follows:
Application Number: JP,2023-105016
Category (FI): G06T7/70@Z,G01B11/24@K,H01L21/68@N,H10P72/70
Stage: PROBLEM TO BE SOLVED: To efficiently recognize the attitude of a component with respect to a substrate processing apparatus.SOLUTION: Based upon design information on an object component, reference shape information associated with a two-dimensional shape of a 3D model for each of a plurality of first virtual camera positions on a plurality of virtual planes along a virtual spherical surface enclosing the 3D model for the object component. Coincidence is calculated between real shape information and the reference shape information associated with a two-dimensional shape of an object in a real image at each first virtual camera position. A high coincidence virtual camera position with the highest coincidence is detected among the plurality of first virtual camera positions. The virtual plane where the high coincidence virtual camera position is set is divided to generate a plurality of virtual division planes. Based upon the design information on the object component, reference shape information associated with the two-dimensional shape of the 3D model is generated for each of a plurality of second virtual camera positions on the plurality of virtual division planes. For each of the second virtual camera positions, a numerical value is calculated which indicates coincidence between the real shape information and the reference shape information.SELECTED DRAWING: Figure 4 (Grant)
Filing Date: June 27, 2023
Publication Date: Jan. 16, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
