Japan Intellectual Property Rights: SUBSTRATE PROCESSING APPARATUS AND PROCESSING CAP CLEANING METHOD

Japan, March 3 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING APPARATUS AND PROCESSING CAP CLEANING METHOD.' Other related details are as follows:

Application Number: JP,2022-030094

Category (FI): H10P70/00,108@K,H01L21/304,643@Z,H10P70/00,103@A,H10P70/00,103@Z,H01L21/304,643@A,H01L21/304,648@K

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Feb. 28, 2022

Publication Date: Sept. 7, 2023

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication.