Japan Intellectual Property Rights: SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

Japan, March 3 -- KIOXIA CORP has got intellectual property rights for 'SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD.' Other related details are as follows:

Application Number: JP,2022-046097

Category (FI): H10P70/00,108@G,H01L21/304,648@G,H01L21/304,643@A,H10P70/00,103@A

Stage: Grant (IP right granted following substantive examination.)

Filing Date: March 22, 2022

Publication Date: Oct. 4, 2023

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication.