Japan Intellectual Property Rights: SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

Japan, Aug. 26 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD.' Other related details are as follows:

Application Number: JP,2024-119563

Category (FI): H10P70/00,108@G,H01L21/306@J,H01L21/304,642@A,H01L21/304,642@F,H01L21/304,648@G,H10P50/60@J,H10P70/00,102@A,H10P70/00,102@F

Stage: Grant (IP right granted following substantive examination.)

Filing Date: July 25, 2024

Publication Date: Feb. 5

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication.