Japan, Aug. 31 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD.' Other related details are as follows:
Application Number: JP,2022-171964
Category (FI): H01L21/68@A,H10P95/00,102@B,H10P72/30@A,G05B19/418@Z,H01L21/02@Z
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Oct. 27, 2022
Publication Date: May 14, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
