Japan, Oct. 15 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD.' Other related details are as follows:
Application Number: JP,2023-088639
Category (FI): H01L21/31@C,H10P14/60,101@C,C23C16/455
Stage: Grant (IP right granted following substantive examination.)
Filing Date: May 30, 2023
Publication Date: Dec. 12, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
