Japan Intellectual Property Rights: SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

Japan, Oct. 21 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD.' Other related details are as follows:

Application Number: JP,2022-195898

Category (FI): H01L21/304,643@A,H01L21/304,647@A,H01L21/304,648@A,H01L21/304,648@G,H01L21/304,651@B,H01L21/304,651@Z,H10P70/00,103@A,H10P70/00,107@A,H10P70/00,108@A,H10P70/00,108@G,H10P70/00,201@B,H10P70/00,201@N,H10P70/00,201@Z

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Dec. 7, 2022

Publication Date: June 19, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication.