Japan, Nov. 11 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE PROCESSING APPARATUS.' Other related details are as follows:
Application Number: JP,2022-071477
Category (FI): C23C16/455,H01L21/31@B
Stage: Grant (IP right granted following substantive examination.)
Filing Date: April 25, 2022
Publication Date: Nov. 7, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
