Japan Intellectual Property Rights: SUBSTRATE PROCESSING APPARATUS

Japan, Jan. 15 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE PROCESSING APPARATUS.' Other related details are as follows:

Application Number: JP,2022-207216

Category (FI): F25B9/00@H,H01L21/68@N,H01L21/68@R,H10P72/72

Stage: Grant (IP right document published.)

Filing Date: Dec. 23, 2022

Publication Date: July 4, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication.