Japan, Jan. 23 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE PROCESSING APPARATUS.' Other related details are as follows:
Application Number: JP,2022-129739
Category (FI): H10P50/20,101@G,H10W40/47,H01L23/46,H10W40/40,H01L21/68@R,H01L23/46@Z,H01L21/302,101@G,H10P72/72
Stage: Grant (IP right document published.)
Filing Date: Aug. 16, 2022
Publication Date: Feb. 29, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
