Japan, Aug. 26 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING APPARATUS.' Other related details are as follows:
Application Number: JP,2023-011059
Category (FI): H10P70/00,108@G,H10P70/00,104@B,H01L21/304,644@B,H01L21/304,648@G
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Jan. 27, 2023
Publication Date: Aug. 8, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
