Japan Intellectual Property Rights: SUBSTRATE PROCESSING APPARATUS

Japan, Aug. 31 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING APPARATUS.' Other related details are as follows:

Application Number: JP,2022-161755

Category (FI): H10P70/00,103@C,H10P70/00,103@A,H01L21/304,643@C,H01L21/304,643@A,H01L21/304,643@Z,H10P70/00,103@Z

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Oct. 6, 2022

Publication Date: April 18, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication.