Japan, Sept. 18 -- BROOKS AUTOMATION US LLC has got intellectual property rights for 'SUBSTRATE PROCESSING APPARATUS.' Other related details are as follows:
Application Number: JP,2023-093353
Category (FI): H10P72/30@A,H01L21/68@A,B25J9/06@D
Stage: PROBLEM TO BE SOLVED: To provide a transfer robot that allows the transport of substrates to at least two processing stations in a sequential linear arrangement using a stationary drive section.SOLUTION: A transfer robot 130 includes a drive section 200 and at least one transfer arm section 210. The at least one transfer arm section includes: at least one base arm 220 fixed at one end with respect to a transfer chamber and rotatably coupled to the drive section; and at least one transfer arm 214 rotatably coupled to a common end of the at least one transfer arm section. The at least one transfer arm has one, two or more end effectors 211. The drive section has three independent axes of rotation defining three degrees of freedom. One degree of freedom moves the at least one base arm horizontally for transporting the at least one transfer arm, and two degrees of freedom drives the at least one transfer arm to extend and retract the at least one transfer arm and swap the two end effectors.SELECTED DRAWING: Figure 2A (Grant)
Filing Date: June 6, 2023
Publication Date: Aug. 16, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
