Japan, Oct. 21 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE PROCESSING APPARATUS.' Other related details are as follows:
Application Number: JP,2025-005305
Category (FI): H01L21/30,568,H10P76/00,568
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Jan. 15, 2025
Publication Date: April 10, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
