Japan, March 25 -- SAITAMA UNIV,SHIN ETSU POLYMER CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING CONTROL DEVICE AND SYSTEM.' Other related details are as follows:
Application Number: JP,2022-143183
Category (FI): B23K26/53,C30B33/04,H01L21/304,611@Z,H10P54/90,101@Z,H10P54/30,H10P54/20,101
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Sept. 8, 2022
Publication Date: March 21, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
