Japan, Feb. 18 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING DEVICE AND MONITORING METHOD.' Other related details are as follows:
Application Number: JP,2022-043754
Category (FI): H10P70/00,103@A,H01L21/30,562,H01L21/306@R,H10P76/00,562,B05C11/00,H10P50/60@R,B05C11/08,H01L21/304,643@A
Stage: Grant (IP right granted following substantive examination.)
Filing Date: March 18, 2022
Publication Date: Sept. 29, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
