Japan, March 5 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING DEVICE AND SUBSTRATE DETECTION METHOD.' Other related details are as follows:
Application Number: JP,2022-029251
Category (FI): H10P70/00,108@A,H10P70/00,108@G,H10P70/00,103@B,H01L21/304,648@G,H01L21/304,648@A,H01L21/304,643@B,H01L21/68@A,H10P72/30@A
Stage: PROBLEM TO BE SOLVED: To provide a technique that makes it possible to make detection with sufficient accuracy even in an environment where liquids are handled.SOLUTION: A substrate processing device includes a conveyance unit for conveying a substrate 9, a liquid processing unit for supplying the substrate 9 that is conveyed by the conveyance unit with liquid, and a sensor unit 4 for detecting the substrate 9 to which the liquid is supplied. The sensor unit 4 includes a sensor part 41 and a droplet removal part 42. The sensor part 41 includes a light-projection portion 411 that projects detection light toward the substrate 9 and a light-receiving portion 412 that receives the detection light projected from the light-emitting portion. The droplet removal part 42 is provided by corresponding to the sensor part 41 and locally removes droplets of an irradiation area K1 irradiated with the detection light projected from the corresponding light-projection portion of the sensor part 41.SELECTED DRAWING: Figure 7 (Grant)
Filing Date: Feb. 28, 2022
Publication Date: Sept. 7, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
