Japan Intellectual Property Rights: SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD

Japan, Jan. 15 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD.' Other related details are as follows:

Application Number: JP,2022-101428

Category (FI): C23C16/52,H01L21/31@E,H01L21/324@K,H01L21/324@T,H10P14/60,101@E,H10P95/90,101@J,H10P95/90,101@T

Stage: Grant (IP right document published.)

Filing Date: June 23, 2022

Publication Date: Jan. 11, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication.