Japan, Jan. 15 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD.' Other related details are as follows:
Application Number: JP,2021-156618
Category (FI): H01L21/306@R,H10P50/60@R
Stage: Grant (IP right document published.)
Filing Date: Sept. 27, 2021
Publication Date: April 6, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
