Japan, April 22 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD.' Other related details are as follows:
Application Number: JP,2022-151288
Category (FI): H01L21/318@B,H10P14/692@X,H10P14/694@B,C23C16/458,C23C16/455,H10P14/60,101@B,H01L21/31@B,H01L21/316@X
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Sept. 22, 2022
Publication Date: April 3, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
