Japan, Sept. 18 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD.' Other related details are as follows:
Application Number: JP,2023-012453
Category (FI): H01L21/304,648@K,H01L21/304,643@A,H10P70/00,103@A,H10P70/00,108@K
Stage: PROBLEM TO BE SOLVED: To smoothly cool electrolytic sulfuric acid.SOLUTION: A substrate processing device includes: a substrate processing unit for processing a substrate using processing liquid containing electrolytic sulfuric acid; a supply tank for raising the temperature of the processing liquid and supplying the processing liquid to the substrate processing unit; a generation unit for generating the processing liquid with electrolysis and supplying the generated processing liquid to the supply tank; and a recovery unit which recovers post-supply liquid being the processing liquid that has been supplied to the substrate processing unit but has not been used to process the substrate and supplies the post-supply liquid to the generation unit while cooling the post-supply liquid to the electrolytic temperature being the temperature for generating the processing liquid with electrolysis.SELECTED DRAWING: Figure 1 (Grant)
Filing Date: Jan. 31, 2023
Publication Date: Aug. 13, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
