Japan, Jan. 20 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE PROCESSING DEVICE AND TEMPERATURE ADJUSTMENT METHOD.' Other related details are as follows:
Application Number: JP,2022-103981
Category (FI): H10P14/692@X,H10P14/60,101@B,H01L21/316@X,H01L21/31@B
Stage: Grant (IP right document published.)
Filing Date: June 28, 2022
Publication Date: Jan. 16, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
