Japan, Feb. 18 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING DEVICE.' Other related details are as follows:
Application Number: JP,2022-133227
Category (FI): H01L21/304,642@A,H01L21/304,643@A,H01L21/304,648@A,H01L21/304,651@Z,H01L21/68@A,H10P70/00,102@A,H10P70/00,103@A,H10P70/00,108@A,H10P70/00,201@N,H10P70/00,201@Z,H10P72/30@A
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Aug. 24, 2022
Publication Date: March 7, 2024
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
