Japan Intellectual Property Rights: SUBSTRATE PROCESSING DEVICE

Japan, March 3 -- SHIBAURA MECHATRONICS CORP has got intellectual property rights for 'SUBSTRATE PROCESSING DEVICE.' Other related details are as follows:

Application Number: JP,2022-027881

Category (FI): H10P72/70,H10P70/00,201@L,H10P70/00,201@B,H10P70/00,108@L,H10P70/00,108@A,H10P70/00,103@A,H01L21/68@N,H01L21/304,648@A,H01L21/304,651@L,H01L21/304,651@B,H01L21/304,643@A,H01L21/304,648@L

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Feb. 25, 2022

Publication Date: Sept. 6, 2023

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication.