Japan, July 20 -- TOKYO ELECTRON LTD has got intellectual property rights for 'SUBSTRATE PROCESSING DEVICE.' Other related details are as follows:
Application Number: JP,2022-126982
Category (FI): H01L21/68@P,H10P76/00,566,H10P72/78,H01L21/30,566
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Aug. 9, 2022
Publication Date: April 27, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication.
