Japan Intellectual Property Rights: SUBSTRATE PROCESSING EQUIPMENT AND SUBSTRATE PROCESSING METHOD

Japan, Aug. 31 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING EQUIPMENT AND SUBSTRATE PROCESSING METHOD.' Other related details are as follows:

Application Number: JP,2023-091559

Category (FI): H01L21/304,648@L,H10P70/00,105@Z,H10P70/00,108@L,H01L21/302,104@H,H01L21/304,645@Z,H10P50/28

Stage: Grant (IP right granted following substantive examination.)

Filing Date: June 2, 2023

Publication Date: Dec. 12, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication.