Japan Intellectual Property Rights: SUBSTRATE PROCESSING LIQUID, SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

Japan, March 3 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'SUBSTRATE PROCESSING LIQUID, SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS.' Other related details are as follows:

Application Number: JP,2022-027520

Category (FI): H01L21/304,643@D,H10P70/00,201@B,H10P70/00,103@D,H10P70/00,103@A,H01L21/304,643@A,H10P70/00,107@Z,H10P70/00,108@G,H01L21/304,651@B,H01L21/304,647@Z,H01L21/304,648@G

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Feb. 25, 2022

Publication Date: Sept. 6, 2023

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication.